EBARA is a leading supplier of special products for the Compound Semiconductor Industry. The technology is based on metal-organic compounds formed by elements from different groups of the periodic table, e.g. GaN, GaAs, InP, SiC. This plays a key role in many of today’s fastest growing market segments, such as LEDs used for FPD backlighting, solid state lighting, traffic lighting, or high performance lasers for blue ray discs and other industrial applications. Future markets are in the area of General Lighting, Photovoltaic and LED on organic base, OLED.

Most of the above applications employ sophisticated processes, such as Metal Organic Chemical Vapour Deposition (MOCVD), Molecular Beam Epitaxy (MBE) and Hydride Vapour Phase Epitaxy (HVPE).

EBARA has specially designed Dry Vacuum Pumps for above processes with a high content of H2 carrier gas. Thanks to the 3-lobe and multi-stage Roots design, EBARA dry vacuum pumps are specially suited to prevent back streaming of H2.
Available pumps range from ESA25-D (150 m3/h) over ESA70W-D (420 m3/h), ESA80W-HDF (480 m3/h) to ESA100W (600 m3/h). Common to all is the ability to handle high Hydrogen gas-loads. They are the pumps of choice in MOCVD processes. The pumps come with a drive motor suited for two voltages, 208 V and 400 V, 3 Phases.

EBARA´s G5 and G6-E Point-of-use Burner Washers abate a wide range of waste gases incl. PFCs with the highest destruction efficiency in the industry. The total waste capacity is 350 slm (G5) resp. 400 slm (G6-E) including nitrogen purge from vacuum pumps. A built-in automatic scraper prevents deposition in the burner area, minimizing downtime for maintenance.

The G5 and G6-E scrubbers have distinct advantages regarding Cost of Ownership and abatement efficiency for many LED processes, such as Oxide Etch, CVD and in cases that PFC gases are used.

The Airgard Cyclone Gas Scrubber is the tool of choice for many epitaxial processes involved in the production of LED. The Airgard scrubber with a max. flow of 1,000 slm features extremely low downtime and cost of ownership, based on the experience with more than 1,400 units working in the field.