Gas Abatement

Burner Washers

EBARA's Burner Washers of the G series (principle: Gas Decomposition by Combustion) are high efficient universal abatement systems for abatement of the waste gases in the semiconductor, photovoltaic and thin films manufacturing. They are designed for the abatement of CVD, etch and cleaning gases.

Wet Scrubbers

Wet scrubbers are highly efficient gas abatement systems for the removal of water soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4). Airgard’s wet scrubbers have great improvements over competition designs. Special measures against gas inlet clogging, its small footprint, and extremely high uptime is benchmark in the gas scrubbing technology.